(1) Pele{1}}kamore e hloekileng
Mosebetsi oa pele-kamore ea vacuum ke ho etsa bonnete ba hore kamore ea ho eta e lula e le boemong bo itseng, ha e amehe ke tikoloho e kantle (joalo ka lerōle, mouoane oa metsi), le ho arola likhase tse kotsi phaposing e hloekileng. E na le sekoaelo, manipulator, mochine oa phetisetso, lemati la ho itšehla thajana, joalo-joalo.
(2) Kamore ea ho khabisa
Kamore ea etching ke sebopeho sa mantlha sa lisebelisoa tsa etching tsa ICP. E na le tšusumetso e tobileng ho sekhahla sa etching, ho tiea ha etching, le ho ba thata. Likarolo tsa mantlha tsa phaposi ea etching ke: li-electrode tse kaholimo, yuniti ea frequency ea radio ea ICP, yuniti ea maqhubu a seea-le-moea sa RF, sistimi e tlase ea li-electrode, sistimi ea taolo ea mocheso, jj.
(3) Tsamaiso ea phepelo ea khase
Sistimi ea phepelo ea khase ke ho isa likhase tse fapaneng tsa etching phaposing ea etching, le ho laola ka nepo sekhahla sa phallo ea khase le ho phalla ka har'a taolo ea khatello (PC) le taolo ea phallo ea boima (MFC). Sistimi ea phepelo ea khase e na le botlolo ea mohloli oa khase, phala ea phepelo ea khase, sistimi ea taolo, mochini o kopanyang, jj.
(4) Sisteme ea Vacuum
Ho na le lisistimi tse peli tsa vacuum, e 'ngoe ke ea-kamore ea vacuum' me e 'ngoe ke ea kamore ea ho patala. Pele-kamore ea vacuum e ntšoa ka pompo ea mochini. Ke feela ha boemo ba vacuum phaposing ea-e fihla ho boleng bo behiloeng moo lemati la ho itšehla thajana le ka buloang ho fetisa sephaphatha.