Plasma Etcher Molao-motheo

Inductively Coupled Plasma Etch (ICPE) ke phello ea motsoako oa lik'hemik'hale le mekhoa ea 'mele. Molao-motheo oa eona ke hore, tlas'a vacuum le khatello e tlase, maqhubu a seea-le-moea a hlahisoang ke phepelo ea motlakase ea ICP RF a hlahisoa ho coil ea toroidal coupling. Khase e tsoakiloeng ka mokhoa o itseng e kopanngoa le ho khantša, ho hlahisa plasma e phahameng-. Tlas'a tšusumetso ea RF e ka tlase ho elektrode, plasma ena e otla bokaholimo ba karolo, e roba likhokahano tsa lik'hemik'hale tsa thepa ea semiconductor sebakeng sa mohlala sa substrate. Lintho tsena tse feto-fetohang li sebetsana le khase ea etching ho etsa metsoako e feto-fetohang, ebe e arohana le karoloana e le likhase ebe e pompeloa ka ntle ho vacuum line.