Kenyelletso ea Plasma Cleaner

Plasma, joalo ka lintho tse tiileng, metsi le likhase, ke boemo ba taba, bo tsejoang hape e le boemo ba bone ba taba. Plasma e thehoa ha matla a lekaneng a sebelisoa khase ho e etsa aone. Likarolo tse "sebetsang" tsa plasma li kenyelletsa li-ion, lielektrone, li-radicals tse sebetsang, li-nuclide tse thabileng (metastable states), le photons. Sistimi ea kalafo ea bokaholimo ba plasma e sebelisa thepa ea likarolo tsena tse sebetsang ho alafa bokaholimo ba sampole, ho fihlela merero e joalo ka ho hloekisa, ho fetola le molora oa photoresist.